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- proceedings
em congressos & conferências
- M. Massi,
R.D. Mansano, P. Verdonck, H.S. Maciel, G.A. Cirino,
R.M. Castro, M.B. Pisani, "Performance Characterisation
of a RIE Reactor with a Built-in RF Excitation Antenna",
44th National Symposium of the American Vacuum Society, San
Jose-CA, USA, 20 - 24 / out / 1997.
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